Electron Beam Evaporation (or e-beam evaporation) is a powerful physical vapor deposition process that allows the user to evaporate materials that are difficult or even impossible to process using standard resistive thermal evaporation. The electron beam is accelerated to a high kinetic energy and focused toward the starting material. The kinetic energy of the electrons is converted into thermal energy that will increase the surface temperature of the materials, leading to evaporation and deposition onto the substrate.
Ferrotec Temescal Features/Capability
- The Temescal Control System (TCS) provides fully integrated, recipe-driven process and vacuum control. The TCS also offers process variable monitoring, process and historical trend tracking, and process data logging.
- Auto mode operation provides fully automated execution of user-programmed recipes consisting of up to twenty process steps, as well as full abort diagnostics. The TCS Auto Mode also offers independent auto-pump and auto-vent operations, automated cryopump regeneration, and automated rate-of-rise testing.
- The evaporator is set up with a rotating “lift-off” plate sample holder that allows 5 pieces of 6-inch wafers (or smaller) to be loaded at once.
- A fast- cycle, load-locked system allows the source to remain under vacuum during substrate reloading. Pump-down can take as little as 15 minutes unless the samples are outgassing.
- Source materials that are always available are chromium, titanium, gold, aluminum. Additional elements may be considered. (Consult clean room staff). In addition, another position is open for requested materials. Copper evaporation is not allowed in this instrument.
Operational Manual
Posted under Cleanroom