Maker: FEI (Thermofisher)
Model: Nova 200 Nanolab
Features:
- Dual beam system
- Acceleration voltage: 5kV to 30 kV
- E-beam resolution: <1.1 nm at 15 kV
- Ion (Ga) beam resolution: 7 nm at 30 kV
- Four (4) gas injectors (Pt, SiO2, C, etch)
- Digital pattering system
Applications:
- Imaging (SE detector)
- Cross section imaging (typical area: 20×10 microns)
- TEM sample preparation (thickness 50 nm – 100 nm)
Posted under Materials Science