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Keithley 4200-SCS
Typical DC test (Ig-Vg, Id-Vg, Id-Vd) DCIV (interface characterization) Time/Sample measurements (BD study) TDDB, TZBD, P/NBTI, HCI
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Agilent 4155
Typical DC test (Ig-Vg, Id-Vg, Id-Vd) DCIV (interface characterization) Time/Sample measurements (BD study) TDDB, TZBD, P/NBTI, HCI
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Agilent 4284
Multi-frequency C-V (2 Hz to 2MHz) Conductance
