Mask Fabrication

HELPFUL DOCUMENTS FOR MAKING A MASK

1. Design the file: the mask writer system supports files in the following formats: .dxf, .gdsii, and .cif
   • Design Rules for the DWL Mask Writer
   • Information regarding feature size and resolution capabilities at UTD
2. Use LinkCAD to check for open polylines and duplicate objects. There is a computer in the Cleanroom office area that supports this task. You must log in with your NetID and password.
3. Request mask fabrication by completing the request form.