Material Surface Technology Resource (MaSTeR)

• 2 preparation rooms, each equipped with 2 hoods
• M-Braun glove boxes, with H₂O and O₂ control
• 2 furnaces 100^oC
• 2 tube furnace 1200^oC
• Centrifuge
• Mettler toledo Microgram scale
• Rayonet UV
• 12 tons press
• Chemical storage cabinet, fridge and freezer

• Nicolet Almega XR Raman, 780 nm and 532 nm
• Jobin Yvon ellipsometer with iHR320 source
• Vecco AFM
• Thermo Nicolet FT-IR: iS-50 with Diamond ATR and 6700 series
• Mettler toledo DMA, TGA, DSC
• Lloyd instr. LR5K plus Universal Testing Machine
• TA instr. RSA G2 DMA
• Agilent Tech. Cary UV-Vis-NIR spectrophotometer
• Horiba FluoroMax-4 spectrofluorometer
• Rame-Hart contact angle (with camera)
• Low Energy Ion Scattering (LEIS)

• Offer the possibility to develop specific vacuum systems coupled with FT-IR spectrometer for characterization.
• Example of Vacuum systems developed recently and in the past 16 years:
  • Various ALD reactors coupled with FT-IR in reflection and/or transmission
  • RF biased plasma reactor with sample heater up to 700^oC
  • Preparation chamber with remote plasma, CVD, physical deposition, electron guns, ion guns, cooling down to -150^oC, heating up to 1200^oC
  • Sintering furnace
  • UHV chamber down to 10^-10 Torr for special projects

This area regroups H₂/O torches for glass sealing, and experimental tools using gases like NO, SO₂, H₂, D₂. That room is equipped with gas detection sensors. The gas cylinders are located in the LER, in dedicated explosion proof gas cabinet. All gas lines are double wall tubing, with safety valves.

The LER is used for storage purposes and to house equipment like chillers, burn box, explosion proof gas cabinets, compressors and mechanical pumps. All the main distribution of house gas (compressed dry air, N₂), liquids (D.I. water, chilled water, hot water) and electricity go through that area and are then redistributed into the lab.