A laser source pattern generator used for making photomasks. A resolution limit of 1.5 microns is reliably demonstrated in our facility.
4 inch and 5 inch photomasks are patterned.
DWL 66 Write Time Chart – Please use this chart for calculating the approximate write time for making a mask. Use this information to schedule the appropriate amount of time on the online scheduler for the DWL66. You will need to know the field area and which lens (2mm, 4mm, or 10mm) you plan to use.
Mask Fabrication Costs – In 2009, the UTD Cleanroom Lab instituted a policy of charging for mask fabrication. These funds are used to support the operation, preventative maintenance, and repairs to the the mask writer. This file contains pricing information for the mask as a function of the laser write head used.
Posted under Cleanroom