The Cryo evaporator is a tech built cryo pumped 8 kilowatt 4 pocket e-gun evaporator used for thin film metal deposition.
Process Data
Control Charts
Electronic Log Book Data Last update 2/12/2024
The link above allow access to ALL accumulated entries since September 2021 when the logbook was started. To enter your VERY own ‘processing data’ as an electronic entry here OR scan this QR Code [also located on each e-beam tool!]
Posted under Cleanroom
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