A new AFM to replace the retired Veeco Dimension V SPM that was retired in July 2020. The Jupiter XR was released to our users for operation on August 10, 2020. A guide for users wanting to perform tapping mode AFM can be found here
This new tool comes with advanced technologies for AFM in the cleanroom lab, including BlueDrive laser technology for establishing stable and low-noise tapping frequencies, Z sensor imaging capabilities for sub 100 nm features, and hardware specifically engineered for fast scan modes that enable high throughput data collection. Generally, the UTD cleanroom users utilize tapping mode AFM, but other modes for electrical and force measurements are available on the the instrument. More information about the capabilities and advanced imaging modes of the Jupiter XR can be found on the Oxford Asylum website.
This tool is capable of scanning samples ranging in size from a few square mm up to a 200 mm wafer. Large area scans up to 100 um x 100 um, and high resolution images of features from 12 um to less than 1 nm can can be accomplished with this instrument. The measured baseline noise for the tool is ~65 pm (measured January 2022).
There is an additional computer workstation in the cleanroom office area that is set up with the Oxford/Asylum software. This workstation allows users to view and process AFM data using the same software as the instrument, without incurring usage fees on the instrument. A UTD NetID is required to log into this computer. If a user has a computer that is running Igor 6.37, the Oxford/Asylum software is available as a free downloadable plug-in. Alternatively, data from the AFM (with a .ibw file extension) can be viewed and processed on Gwyddion
Posted under Cleanroom