The KLA Alpha‐Step Development Series Stylus Profiler is a computerized, high‐sensitivity surface profiler that measures step height, roughness and waviness in a variety of applications. It features the ability to measure precision step heights from under 10 Angstroms to as large as 1.2 mm. The profiler incorporates a new optical deflection height measurement mechanism and magneto static force control system that results in a low force (loads as small as 0.03 mg) and low inertia stylus assembly. These allow for measuring soft films and substrates without surface damage.
The Alpha-Step Series profiler provides the following features:
- Measurement of vertical features ranges from under 10 Å to over 1 mm with a vertical resolution better than 1 Å for the 2.5 μm range setting and 100 nm resolution for the 1.2 mm range setting. Measurements can be taken in metric or English units, which are selectable independently for horizontal and vertical parameters.
- Up to 400,000 data points per profile guarantee that the horizontal resolution is generally limited by the stylus radius and not the number of data points.
- Measurement of many roughness and waviness parameters with the roughness and waviness separated by user‐selectable cutoff filters.
- Motorized positioning of the sample surface to within 0.5 microns in X‐Y using the Alpha‐Step D‐600 configuration.
- Many easy-to-use features, including software adjustable force control, intuitive user interface, easy mouse control of measurement cursors and stage position.
- Accommodates samples over 200mm in diameter and heights up to 30mm.
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