This tool is a spectroscopic ellipsometer that measures thickness, refractive index, and absorption properties of single thin films and multi-layer thin film stacks. Light with a known polarization is reflected off a sample at a known angle, the polarization will change based on the refractive index and the film thickness. The spectral range of the tool is 193-1000nm, a wavelength range that is perfect for semiconductor requirements. Short wavelengths can increase sensitivity to ultra-thin films, while simultaneous collection at longer wavelengths ensures accurate thickness of transparent films. The hardware is operated by a comprehensive software package (WVASE32) that controls data acquisition, modeling, fitting, and reporting of ellipsometric data.
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