1. How do I get cleanroom access, how long does it take?
Lab access is initiated by filling out the request form (https://cores.research.utdallas.edu/cleanroom/lab-access/ ). The 6 steps are explained in the above link and takes ~ 1 week to grant access.
2. Who provides tool training and when can I use a tool?
After gaining CRL access, reach out to the tool trainer to schedule a training session. Go to : https://cores.research.utdallas.edu/cleanroom/tools/ and click on “Tool Owner List” to find the trainer’s name and contact information.
3. My badge does not work.
After a user is granted access to the core facility lab, it may take up to 24 hours for the badge to be activated. Please be patient. If the badge still does not work after 24 hours, please contact Sasha: Hsing.Hansen@UTDallas.edu and/or cleanroom@utdallas.edu
4. I lost my badge.
If you are an internal user (UTD students/staff), please go to Comet Card Office at Student Service Addition (2nd floor, SSA 12.324) and get your card replaced there. If you are an external user, please email Cleanroom/Sasha. Please note that the user is responsible for the replacement card cost ($20). (Sasha:Hsing.Hansen@UTDallas.edu/Cleanroom: CleanRoom@utdallas.edu)
5. Where do I pick up my comet card?
Please go to Comet Card Office at Student Service Addition (2nd floor), SSA 12.324. Email: cometcard@utdallas.edu
6. I don’t have an RL/BSB badge.
We can only assist if you need access to cleanroom or core facility (go to question 1 to request access to core facility). If you need badge for NSERL/BSB building access for a PI lab, please contact your department AA.
7. I need sample storage.
Due to the limited storage space available for each group, we cannot accommodate all users’ needs. To optimize our limited storage space, we will periodically request users to remove any unused samples or boxes.
8. I need a photo mask.
Submit your request using the form at https://redcap.utdallas.edu/surveys/?s=48JMWYPPYE and contact Huiping Jia at huiping.jia@utdallas.edu with questions regarding form details.
9. I need a buddy, but I don’t have.
Please plan ahead to arrange for a buddy to be with you in the cleanroom.
Read: https://cores.research.utdallas.edu/manuals/safety-manual-and-operating-procedures/#the-buddy
Who can be my buddy? Any person qualified to be in the cleanroom can be your buddy. Your buddy does not have to be someone from your research group or someone you know personally. It should be another person who understands that the two of you are alone in the lab and will periodically check on each other, assisting in case of an emergency evacuation. If you are in the lab early or late and staff are present, check in with them so they understand they are your buddy. Staff may be requested to be a buddy and on rare occasions we can be a buddy for a short duration. Otherwise, users need to plan ahead to work with someone, especially on weekends.
10. What are the hours of operation for the Cleanroom? Is the Cleanroom ever closed?
The cleanroom is open for users 7 days a week from 7am to 9pm. It fully closes during the university winter break for facilities maintenance. Otherwise, the lab remains open, except in case of emergencies. Please note that Bay 5 is open 24/7, except during the winter shutdown. Also, check your email re: closures.
11. I need a target in the AJA sputter tool.
Please submit your request using this form and Contact Zane Borg (Zane.Borg@utdallas.edu) or Audrey Hammack (ash107020@utdallas.edu) with questions regarding the form details.
12. I need to grow thermal oxide.
Please submit your request using this form and contact Audrey Hammack at ash107020@utdallas.edu with questions regarding form details.
13. I need LPCVD film deposition.
Request deposition using this form and contact Audrey Hammack at ash107020@utdallas.edu with any questions regarding form details.
14. Why can’t I operate the LPCVD tool?
User operation of this tool is forbidden. We do not permit users to operate the tool because we do not want users to generate recipes that are potentially harmful to the tool.
15. Faculty: How do I cancel a user’s Cleanroom access?
Email Cleanroom and Jimmy/Sasha, end-of-semester termination requests are sent to PIs end of each semester.
16. First time users: How can I make reservations?
Go to lab resource scheduler: https://cores.research.utdallas.edu/reservations/
I cannot see the tool on my scheduler list, but you will, once you are trained on an equipment by CRL Staff and with an active account on scheduler (login into scheduler at least once.)
17. What are the specifications of tools?
For cleanroom tools go to https://cores.research.utdallas.edu/cleanroom/tools/. For all tools in core facilities go to Tool Finder.
18. What is the usage/service rates?
Fee schedule can be found on cleanroom website https://cores.research.utdallas.edu/cleanroom/lab-access/.
19. Are there any tool training fees?
Yes, there is a flat fee of $50 per person.
20. We want to use our own photoresist, what is the procedure of getting it inside the cleanroom?
First, check which photoresists are provided by the Cleanroom here: https://cores.research.utdallas.edu/cleanroom/tools/.
If you need something different, please contact Alexandra Joshi-Imre at Alexandra.Joshi-Imre@utdallas.edu and Audrey Hammack at ash107020@utdallas.edu with a filled out new material request form (under “Safety Documents”) https://cores.research.utdallas.edu/cleanroom/safety-guidelines/
21. How do I get access to the SEM inside the Cleanroom? Are there other SEMs at UTD?
There are multiple scanning electron microscopes on campus. The SEM in the Cleanroom is a Zeiss SIGMA model that requires cleanroom access, contact the trainer. Additionally, there is a Zeiss EVO model in the Imaging and Histology Core and a JEOL NeoScope model in the Materials Science Core.
22. Can the spin-coaters be used for other materials than photoresists?
Yes, but please contact Alexandra Joshi-Imre Alexandra.Joshi-Imre@utdallas.edu and Audrey Hammack ash107020@utdallas.edu for approval. If you plan to bring your material for spin coating, you may need to complete a new material request form (under “Safety Documents”) https://cores.research.utdallas.edu/cleanroom/safety-guidelines/
23. Are there Cleanroom Student Intern positions available?
We offer Student Intern positions (pending availability of funds) over the Summer. Please contact the Cleanroom Director at jimmy@utdallas.edu for more information in March.